Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394604 | Plasma source with floating electrodes | Quoc Truong, Robert B. Moore | 2025-08-19 |
| 12317378 | Multi-zone heater control for wafer processing equipment | Uwe Haller, Kiyki-Shiy Shang | 2025-05-27 |
| 12288677 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Gregory J. Wilson, Sriharish Srinivasan | 2025-04-29 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Xiaopu Li, Jozef Kudela, Kallol Bera, Tsutomu Tanaka | 2025-02-11 |
| 12198908 | Magnetically coupled RF filter for substrate processing chambers | Edward P. Hammond, IV, Alexander V. Garachtchenko | 2025-01-14 |