Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198908 | Magnetically coupled RF filter for substrate processing chambers | Dmitry A. Dzilno, Alexander V. Garachtchenko | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198908 | Magnetically coupled RF filter for substrate processing chambers | Dmitry A. Dzilno, Alexander V. Garachtchenko | 2025-01-14 |