Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195851 | Thin layer deposition with plasma pulsing | Cong Trinh, Maribel Maldonado-Garcia, Mihaela Balseanu, Tsutomu Tanaka | 2025-01-14 |
| 12198908 | Magnetically coupled RF filter for substrate processing chambers | Edward P. Hammond, IV, Dmitry A. Dzilno | 2025-01-14 |