Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362169 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Li-Qun Xia | 2025-07-15 |
| 12195851 | Thin layer deposition with plasma pulsing | Cong Trinh, Mihaela Balseanu, Alexander V. Garachtchenko, Tsutomu Tanaka | 2025-01-14 |