Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Li-Qun Xia, Keiichi Tanaka, Steven Marcus | 2025-09-30 |
| 12362169 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Li-Qun Xia, Maribel Maldonado-Garcia | 2025-07-15 |
| 12334394 | Methods and apparatus for selective etch stop capping and selective via open for fully landed via on underlying metal | Suketu Arun Parikh, Bhaskar Jyoti Bhuyan, Ning Li, Mark Saly, Aaron Dangerfield +2 more | 2025-06-17 |
| 12195851 | Thin layer deposition with plasma pulsing | Cong Trinh, Maribel Maldonado-Garcia, Alexander V. Garachtchenko, Tsutomu Tanaka | 2025-01-14 |