| 12486559 |
Method of metal oxide infiltration into photoresist |
Nancy Fung |
2025-12-02 |
| 12473316 |
Molybdenum (0) precursors for deposition of molybdenum films |
Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Hai Q. Huynh, Doreen Wei Ying Yong +1 more |
2025-11-18 |
| 12469715 |
Dry etching with etch byproduct self-cleaning |
Zhaohui George Yao, Qianyan Fu, Yang Yang, Jeffrey W. Anthis, David Knapp +1 more |
2025-11-11 |
| 12438050 |
Electronic device fabrication using area-selective deposition |
Zachary J. Devereaux, Bhaskar Jyoti Bhuyan, Thomas Knisley, Zeqing Shen, Susmit Singha Roy +1 more |
2025-10-07 |
| 12435411 |
Metal organonitrile precursors for thin film deposition |
Thomas Knisley, Bhaskar Jyoti Bhuyan, Shalini Tripathi, Charles H. Winter, Zachary J. Devereaux |
2025-10-07 |
| 12415824 |
Molybdenum(0) precursors for deposition of molybdenum films |
Chandan Kr Barik, John Sudijono, Chandan Das, Doreen Wei Ying Yong, Bhaskar Jyoti Bhuyan +1 more |
2025-09-16 |
| 12394620 |
Benzyl compound passivation for selective deposition and selective etch protection |
Feng Q. Liu, David Thompson |
2025-08-19 |
| 12338547 |
Method for forming silicon-phosphorous materials |
Errol Antonio C. Sanchez, Schubert S. Chu, Abhishek Dube, Srividya Natarajan |
2025-06-24 |
| 12334394 |
Methods and apparatus for selective etch stop capping and selective via open for fully landed via on underlying metal |
Suketu Arun Parikh, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Ning Li, Aaron Dangerfield +2 more |
2025-06-17 |
| 12315733 |
Enhanced etch selectivity using halides |
David Knapp, Feng Qiao, Hailong Zhou, Junkai He, Qian Fu +2 more |
2025-05-27 |
| 12305275 |
Corrosion resistant film on a chamber component and methods of depositing thereof |
Lisa J. Enman, Steven Marcus, Lei Zhou |
2025-05-20 |
| 12300503 |
Etching of metal oxides using fluorine and metal halides |
Keenan N. Woods, Zhenjiang Cui |
2025-05-13 |
| 12300491 |
Deposition of semiconductor integration films |
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more |
2025-05-13 |
| 12291779 |
Methods of selective atomic layer deposition |
Bhaskar Jyoti Bhuyan, David Thompson, Tobin Kaufman-Osborn, Kurt Fredrickson, Thomas Knisley +1 more |
2025-05-06 |
| 12281382 |
Methods for depositing blocking layers on conductive surfaces |
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Michael Haverty +1 more |
2025-04-22 |
| 12282256 |
Photoresist deposition using independent multichannel showerhead |
Farzad Houshmand, Wayne French, Anantha K. Subramani, Kelvin Chan, Lakmal C. Kalutarage |
2025-04-22 |
| 12281387 |
Method of depositing metal films |
Feng Q. Liu, David Thompson, Annamalai Lakshmanan, Avgerinos V. Gelatos, Joung Joo Lee |
2025-04-22 |
| 12272551 |
Selective metal removal with flowable polymer |
Liqi Wu, Feng Q. Liu, Bhaskar Jyoti Bhuyan, James Hugh Connolly, Zhimin QI +7 more |
2025-04-08 |
| 12261049 |
Selective etch of a substrate |
David Thompson, Bhaskar Jyoti Bhuyan, Lisa J. Enman, Aaron Dangerfield, Jesus Candelario Mendoza +2 more |
2025-03-25 |
