Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12469715 | Dry etching with etch byproduct self-cleaning | Zhaohui George Yao, Qianyan Fu, Mark Saly, Yang Yang, Jeffrey W. Anthis +1 more | 2025-11-11 |
| 12315733 | Enhanced etch selectivity using halides | Feng Qiao, Hailong Zhou, Junkai He, Qian Fu, Mark Saly +2 more | 2025-05-27 |
| 12272531 | Dual pressure oxidation method for forming an oxide layer in a feature | Christopher S. Olsen, Rene George, Tsung-Han Yang, Lara Hawrylchak | 2025-04-08 |