Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334354 | Sidewall passivation for plasma etching | Zhonghua Yao, Aaron Eppler, Mukund Srinivasan | 2025-06-17 |
| 12315733 | Enhanced etch selectivity using halides | David Knapp, Feng Qiao, Hailong Zhou, Junkai He, Mark Saly +2 more | 2025-05-27 |
| 12198928 | Carbon gap fill processes | Abhijeet S. Bagal | 2025-01-14 |