Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334354 | Sidewall passivation for plasma etching | Zhonghua Yao, Qian Fu, Mukund Srinivasan | 2025-06-17 |
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Deyang Li, Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu +5 more | 2025-02-25 |