Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255055 | Integrated cleaning process for substrate etching | Yi Zhou, Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Rajinder Dhindsa | 2025-03-18 |
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Deyang Li, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu, Jason A. Kenney +5 more | 2025-02-25 |