Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu, Jason A. Kenney +5 more | 2025-02-25 |