Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12397330 | Condition selectable backside gas | Stephen Prouty, Martin Perez-Guzman, Sumanth Banda, Alvaro Garcia de Gorordo | 2025-08-26 |
| 12354847 | Methods and apparatus for conductance liners in semiconductor process chambers | Timothy Joseph Franklin, Daniel Sang Byun, Carlaton WONG | 2025-07-08 |
| 12255051 | Multi-shape voltage pulse trains for uniformity and etch profile tuning | Linying Cui, James Rogers, Daniel Sang Byun, Keith HERNANDEZ | 2025-03-18 |
| 12255055 | Integrated cleaning process for substrate etching | Yi Zhou, Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Sunil Srinivasan | 2025-03-18 |
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2025-02-25 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Timothy Joseph Franklin, Steven E. Babayan, Anwar Husain +2 more | 2025-01-28 |