Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381109 | Hermetic tubular linear motor based wafer lift actuator | Phillip Criminale, Cory Bowdach | 2025-08-05 |
| 12341048 | Porous plug for electrostatic chuck gas delivery | Xue Yang Chang, Anwar Husain, Timothy Joseph Franklin, Joseph F. Sommers | 2025-06-24 |
| 12237200 | Lift pin interface in a substrate support | — | 2025-02-25 |
| 12211734 | Lift pin mechanism | Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan, Anwar Husain +2 more | 2025-01-28 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Xue Yang Chang, Anwar Husain, Timothy Joseph Franklin +1 more | 2025-01-14 |