XC

Xue Yang Chang

Applied Materials: 4 patents #91 of 1,465Top 7%
Overall (2025): #27,363 of 469,880Top 6%
4
Patents 2025

Issued Patents 2025

Patent #TitleCo-InventorsDate
12341048 Porous plug for electrostatic chuck gas delivery Alexander SULYMAN, Anwar Husain, Timothy Joseph Franklin, Joseph F. Sommers 2025-06-24
D1066275 Baffle for anti-rotation process kit for substrate processing chamber Rohan Rane, Timothy Joseph Franklin, Daniel Sang Byun 2025-03-11
12211734 Lift pin mechanism Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan +2 more 2025-01-28
12198903 Plasma resistant arc preventative coatings for manufacturing equipment components Joseph F. Sommers, Joseph Behnke, Anwar Husain, Alexander SULYMAN, Timothy Joseph Franklin +1 more 2025-01-14