Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406865 | Substrate carrier with array of independently controllable heater elements | Phillip Criminale, Zhiqiang Guo | 2025-09-02 |
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Anwar Husain +2 more | 2025-01-28 |