Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424481 | Modular substrate support assembly | Arvinder Manmohan Singh Chadha, Glen T. Mori, Christopher Laurent Beaudry | 2025-09-23 |
| 12400896 | Fabrication of substrate support devices using inorganic dielectric bonding | — | 2025-08-26 |
| 12347659 | Electrostatic chuck assembly for cryogenic applications | — | 2025-07-01 |
| 12331984 | Cryogenic micro-zone electrostatic chuck connector assembly | — | 2025-06-17 |
| 12334315 | Cooled substrate support assembly for radio frequency environments | Andreas Schmid, Andrew Antoine NOUJAIM, Stephen Prouty, Alvaro Garcia de Gorordo, Martin Perez-Guzman | 2025-06-17 |
| 12334385 | Tunable temperature controlled substrate support assembly | Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12243756 | Temperature controlled substrate support assembly | Konstantin Makhratchev, Masanori Ono, Zhiqiang Guo | 2025-03-04 |
| 12224198 | Electrostatic chuck with mesas | Ashutosh Agarwal | 2025-02-11 |
| 12205843 | Ground electrode formed in an electrostatic chuck for a plasma processing chamber | Michael R. Rice | 2025-01-21 |