Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424481 | Modular substrate support assembly | Arvinder Manmohan Singh Chadha, Vijay D. Parkhe, Glen T. Mori | 2025-09-23 |
| D1092213 | Packaging insert for a process chamber component | Joseph Behnke, Trevor Edward Wilantewicz, Timothy Douglas Toth, Scott Osterman | 2025-09-09 |
| 12404584 | Parallel atomic layer deposition of target element interiors | Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Hanish Kumar Panavalappil Kumarankutty, Gayatri Natu +4 more | 2025-09-02 |
| 12406832 | Semiconductor chamber components with advanced dual layer nickel-containing coatings | Laksheswar Kalita, Nitin K. Ingle, Nilesh Mistry, Jonathan Strahle, Lok Kee Loh | 2025-09-02 |
| 12362150 | Semiconductor chamber components with advanced coating techniques | Laksheswar Kalita, Joseph Behnke, Ryan Pakulski, Jonathan Strahle | 2025-07-15 |