Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334315 | Cooled substrate support assembly for radio frequency environments | Vijay D. Parkhe, Andreas Schmid, Stephen Prouty, Alvaro Garcia de Gorordo, Martin Perez-Guzman | 2025-06-17 |