Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12243756 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Masanori Ono, Zhiqiang Guo | 2025-03-04 |