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Substrate carrier with array of independently controllable heater elements |
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Decontamination device |
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| 12397075 |
Pass box |
Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Tsukasa Kitano |
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Decontamination system |
Koji Kawasaki, Gun SOU, Tsukasa Kitano, Haruka Futamura, Yukihiro Yazaki +2 more |
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| 12334385 |
Tunable temperature controlled substrate support assembly |
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| 12318798 |
Mist supply device |
Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more |
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| 12243756 |
Temperature controlled substrate support assembly |
Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono |
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| 12194184 |
Decontamination device and pass box in which same is disposed |
Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more |
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| 12194185 |
Continuous decontamination device |
Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more |
2025-01-14 |
