Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406865 | Substrate carrier with array of independently controllable heater elements | Steven E. Babayan, Zhiqiang Guo | 2025-09-02 |
| 12381109 | Hermetic tubular linear motor based wafer lift actuator | Alexander SULYMAN, Cory Bowdach | 2025-08-05 |
| 12272575 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Jaeyong Cho | 2025-04-08 |