Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368020 | Pulsed voltage source for plasma processing applications | A N M Wasekul AZAD, Kartik Ramaswamy, Yang Yang, Yue Guo | 2025-07-22 |
| 12278094 | Methods and apparatus for processing a substrate | Richard Fovell, Chunlei Zhang | 2025-04-15 |
| 12272575 | Advanced temperature control for wafer carrier in plasma processing chamber | Chunlei Zhang, Phillip Criminale, Jaeyong Cho | 2025-04-08 |
| 12205797 | Solid-state switch based high-speed pulser with plasma IEDF modification capability through multilevel output functionality | Kartik Ramaswamy, Yue Guo, Yang Yang, A. N. M. Wasekul Azad | 2025-01-21 |