Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278094 | Methods and apparatus for processing a substrate | Fernando Silveira, Chunlei Zhang | 2025-04-15 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more | 2025-01-07 |