Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yang Yang | 2025-06-17 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more | 2025-01-07 |