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Mainframe with integrated lid |
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Dithering or dynamic offsets for improved uniformity |
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Electronic device manufacturing system |
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Zone-controlled rare-earth oxide ALD and CVD coatings |
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| 12211714 |
Reconfigurable mainframe with replaceable interface plate |
— |
2025-01-28 |
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Ground electrode formed in an electrostatic chuck for a plasma processing chamber |
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