Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Kenneth Brian Doering, Kartik Shah, Kevin Griffin, Hao Zhang | 2025-06-24 |
| 12305283 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2025-05-20 |