Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Gregory J. Wilson, Karthik Ramanathan, Mario D. Silvetti | 2025-09-02 |
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Kenneth Brian Doering, Hanhong Chen, Kartik Shah, Hao Zhang | 2025-06-24 |