Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Karthik Ramanathan, Mario D. Silvetti, Kevin Griffin | 2025-09-02 |
| 12344955 | Electroplating co-planarity improvement by die shielding | Charles Sharbono, Paul R. McHugh, John L. Klocke, Nolan L. Zimmerman | 2025-07-01 |
| 12288677 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Sriharish Srinivasan | 2025-04-29 |