Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Gregory J. Wilson, Karthik Ramanathan, Kevin Griffin | 2025-09-02 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Muhannad Mustafa, Mandyam Sriram, Sanjeev Baluja | 2025-05-20 |