Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398808 | High conductance variable orifice valve | Sanjeev Baluja | 2025-08-26 |
| D1080812 | Gas mixer | Youngki Chang, Dhritiman Subha Kashyap, Rakesh Ramadas, Ashutosh Agarwal, Shashidhara Patel H B +1 more | 2025-06-24 |
| 12308218 | Thermal shield for processing chamber | Youngki Chang, Kartik Shah, Dhritiman Subha Kashyap, Dhivanraj Subramanian | 2025-05-20 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Mario D. Silvetti, Mandyam Sriram, Sanjeev Baluja | 2025-05-20 |
| 12293902 | Process kit for a substrate support | Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12276344 | Self-adjustable variable orifice check valve for back pressure reduction | Sanjeev Baluja | 2025-04-15 |
| 12224195 | Centering wafer for processing chamber | Sanjeev Baluja | 2025-02-11 |