Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315745 | Heater cover plate for uniformity improvement | Ilker Durukan | 2025-05-27 |
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |