Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Gregory J. Wilson, Karthik Ramanathan, Mario D. Silvetti, Kevin Griffin | 2025-09-02 |
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Hanhong Chen, Kartik Shah, Kevin Griffin, Hao Zhang | 2025-06-24 |
| 12257592 | Showerhead with embedded nut | — | 2025-03-25 |