Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1081569 | Servo amplifier | Hiroyuki Kato, Shinichi Kato, Asuna Osawa, Masaaki Kadoyanagi, Shotaro Hirako +1 more | 2025-07-01 |
| D1076807 | Servo amplifier | Hiroyuki Kato, Shinichi Kato, Asuna Osawa, Masaaki Kadoyanagi, Shotaro Hirako +1 more | 2025-05-27 |
| 12288677 | Vertically adjustable plasma source | Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Gregory J. Wilson, Sriharish Srinivasan | 2025-04-29 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Xiaopu Li, Jozef Kudela, Kallol Bera, Dmitry A. Dzilno | 2025-02-11 |
| 12205845 | Semiconductor processing chamber to accommodate parasitic plasma formation | Khokan Chandra Paul, Adam J. Fischbach, Abhijit A. Kangude, Juan Carlos Rocha-Alvarez | 2025-01-21 |
| 12195851 | Thin layer deposition with plasma pulsing | Cong Trinh, Maribel Maldonado-Garcia, Mihaela Balseanu, Alexander V. Garachtchenko | 2025-01-14 |