Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266550 | Multiple process semiconductor processing system | Nitin Pathak, Vinay Prabhakar, Badri Narayan Ramamurthi, Viren Kalsekar | 2025-04-01 |
| 12217937 | Radio frequency source for inductively coupled and capacitively coupled plasmas in substrate processing chambers | Abdul Aziz Khaja | 2025-02-04 |
| 12205845 | Semiconductor processing chamber to accommodate parasitic plasma formation | Khokan Chandra Paul, Tsutomu Tanaka, Adam J. Fischbach, Abhijit A. Kangude | 2025-01-21 |