Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424414 | Semiconductor processing system with a manifold for equal splitting and common divert architecture | Arun Chakravarthy Chakravarthy, Dharma Ratnam Srichurnam, Hossein Rezvantalab | 2025-09-23 |
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Ganesh Balasubramanian | 2025-08-26 |
| 12266550 | Multiple process semiconductor processing system | Nitin Pathak, Badri Narayan Ramamurthi, Viren Kalsekar, Juan Carlos Rocha-Alvarez | 2025-04-01 |
| 12211728 | Electrostatic chuck design with improved chucking and arcing performance | Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha | 2025-01-28 |
| 12191115 | Dual RF for controllable film deposition | Venkata Sharat Chandra Parimi, Xiaoquan Min, Zheng John Ye, Prashant Kumar Kulshreshtha, Lu Xu +1 more | 2025-01-07 |