Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347653 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2025-07-01 |
| 12334384 | Methods and apparatus for minimizing substrate backside damage | Liangfa Hu, Abdul Aziz Khaja, Prashant Kumar Kulshreshtha, Yoichi Suzuki | 2025-06-17 |
| 12234549 | Method of in situ ceramic coating deposition | Abdul Aziz Khaja, Ratsamee Limdulpaiboon, Kwangduk Douglas Lee | 2025-02-25 |
| 12211673 | Processing chamber deposition confinement | Venkata Sharat Chandra Parimi, Sungwon Ha, Kwangduk Douglas Lee | 2025-01-28 |
| 12211728 | Electrostatic chuck design with improved chucking and arcing performance | Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar | 2025-01-28 |