Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347653 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Nitin Pathak +2 more | 2025-07-01 |
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Shekhar ATHANI +2 more | 2025-06-03 |
| 12266550 | Multiple process semiconductor processing system | Nitin Pathak, Vinay Prabhakar, Viren Kalsekar, Juan Carlos Rocha-Alvarez | 2025-04-01 |
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang +3 more | 2025-03-18 |