Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424413 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2025-09-23 |
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Badri Narayan Ramamurthi, Shekhar ATHANI +2 more | 2025-06-03 |