Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424413 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Matthew J. Busche | 2025-09-23 |
| 12309888 | Heated substrate support | — | 2025-05-20 |
| 12198967 | Substrate support designs for a deposition chamber | Kaushik RAO, Anubhav Srivastava, Santhosh Kumar PILLAPPA | 2025-01-14 |