Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi, Shekhar ATHANI +2 more | 2025-06-03 |
| 12288704 | Methods and apparatus for processing a substrate | Ralph P. ANTONIO, Lee Guan Tay, Peter Lai, Tzu-Fang Huang, Jeffrey C. Hudgens | 2025-04-29 |