Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Zubin Huang, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang, Badri Narayan Ramamurthi +3 more | 2025-03-18 |
| 12211673 | Processing chamber deposition confinement | Sarah Michelle Bobek, Sungwon Ha, Kwangduk Douglas Lee | 2025-01-28 |
| 12211728 | Electrostatic chuck design with improved chucking and arcing performance | Abdul Aziz Khaja, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Vinay Prabhakar | 2025-01-28 |
| 12191115 | Dual RF for controllable film deposition | Xiaoquan Min, Zheng John Ye, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Lu Xu +1 more | 2025-01-07 |
| 12191169 | Systems and methods for faceplate temperature control | Sungwon Ha, Runyun Pan | 2025-01-07 |