Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334384 | Methods and apparatus for minimizing substrate backside damage | Liangfa Hu, Abdul Aziz Khaja, Sarah Michelle Bobek, Yoichi Suzuki | 2025-06-17 |
| 12211694 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2025-01-28 |
| 12211728 | Electrostatic chuck design with improved chucking and arcing performance | Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Vinay Prabhakar | 2025-01-28 |
| 12191115 | Dual RF for controllable film deposition | Venkata Sharat Chandra Parimi, Xiaoquan Min, Zheng John Ye, Vinay Prabhakar, Lu Xu +1 more | 2025-01-07 |