Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394606 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Andrew Lam, Zeqiong Zhao, Jianhua Zhou, Hshiang AN, Suhail Anwar +2 more | 2025-08-19 |
| 12345139 | One way clutch train for arresting backspin | Chengbao Wang, David Tanner, Randal Perisho | 2025-07-01 |
| 12191115 | Dual RF for controllable film deposition | Venkata Sharat Chandra Parimi, Xiaoquan Min, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Lu Xu +1 more | 2025-01-07 |