Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394606 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Zheng John Ye, Andrew Lam, Zeqiong Zhao, Jianhua Zhou, Hshiang AN +2 more | 2025-08-19 |
| 12312689 | Large-area high-density plasma processing chamber for flat panel displays | Yui Lun WU, Jozef Kudela, Carl A. Sorensen, Jeevan Prakash SEQUEIRA | 2025-05-27 |