Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |
| 12312689 | Large-area high-density plasma processing chamber for flat panel displays | Suhail Anwar, Yui Lun WU, Jozef Kudela, Jeevan Prakash SEQUEIRA | 2025-05-27 |