Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312689 | Large-area high-density plasma processing chamber for flat panel displays | Suhail Anwar, Yui Lun WU, Carl A. Sorensen, Jeevan Prakash SEQUEIRA | 2025-05-27 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Xiaopu Li, Kallol Bera, Tsutomu Tanaka, Dmitry A. Dzilno | 2025-02-11 |