Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala +2 more | 2025-06-24 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2025-02-18 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Kallol Bera, Tsutomu Tanaka, Dmitry A. Dzilno | 2025-02-11 |