Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422357 | Chamber moisture control using narrow optical filters measuring emission lines | Sven Schramm, Martin A. Hilkene, Elias Martinez | 2025-09-23 |
| 12368024 | Methods and apparatus for processing a substrate | Abdullah Zafar, William J. Durand, Xinyuan Chong, Kenric Choi, Weize Hu +4 more | 2025-07-22 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Philip Allan Kraus +2 more | 2025-02-18 |
| 12216015 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | Chuang-Chia Lin, David Peterson, Philip Allan Kraus | 2025-02-04 |