Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394646 | In-chamber low-profile sensor assembly | Wenwei Qiao | 2025-08-19 |
| 12216015 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | David Peterson, Philip Allan Kraus, Amir Bayati | 2025-02-04 |