Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412741 | Silicon oxide gap fill using capacitively coupled plasmas | Deenesh Padhi, Hang Yu | 2025-09-09 |
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Xiaopu Li, Akshay Dhanakshirur, Mayur Govind Kulkarni +2 more | 2025-06-24 |